We offer boron trichloride in a variety of purities and concentrations. Boron trichloride as a selective demethylating agent for hindered ethers . 1986]. 0000013362 00000 n Hazards Identification Toxic, corrosive liquid and gas under pressure. Give us a BORON TRICHLORIDE: ICSC: 0616: Boron chloride Trichloroborane: July 1997: CAS #: 10294-34-5: UN #: 1741 EC Number: 233-658-4 ACUTE HAZARDS PREVENTION FIRE FIGHTING; FIRE & EXPLOSION : Not combustible. Harmful or fatal if inhaled. Vomitus generally has a … 0000016905 00000 n 0000003003 00000 n 0000068885 00000 n Christopher F. Carvalho and Melvyn V. Sargent Abstract. Use explosion-proof Boron trichloride n-Hexane 3-Methylpentane Hazard statements H225 Highly flammable liquid and vapor. This chemical inventory is OSHA's premier one-stop shop for occupational chemical information. threshold limit value (tlv) the amount of a gas/fumes exposure for 8 hours a day for 5 days a week without any harmful effects. �o�-ӥ4^8���j+� �D_g��*3���'�V�%pd5 �%҈]���FJ��`N%K��4�/X�DwԎ(%p��o(��P��'8����вt��F�QpU���.c��h�6� �ͱd�Y��==0�K��*b5�)+�>������J��_��pF[��5�qu4.��}K��c'�1�NBI�}b�da�8�-���rO.��RO���.�=��G��j�}z]U4���(E��r�!h %%EOF Formula. �"231��p2 p�p8�2HiZ7�a\Ü�.n��큕���%�#��� 2�LLL�'9���Txl��`�����)�?y�#ρ43�b E ۪ @Z���j((|�H � �> endobj 41 0 obj <>/Encoding<>>>>> endobj 42 0 obj <>/ColorSpace<>/Font<>/ProcSet[/PDF/Text/ImageC/ImageI]>>/Type/Page>> endobj 43 0 obj <>stream !� ���Κ>�nBk��o�΅�Jŋ�ua�x��e+/Z�. Boron fluoride, Trifluoroborane CAS No. For Boron trifluoride, the BOD adopted the ACGIH TLV of 0.1 ppm (8-hour exposure limit), but maintained the existing exposure limit of 1 ppm (Ceiling Limit) as BC ELs due to sampling issues. Boron trifluoride (7637-07-2) ACGIH ACGIH TLV-TWA (ppm) 0.1 ppm ACGIH ACGIH TLV-C (ppm) 0.7 ppm USA OSHA OSHA PEL (Ceiling) (mg/m³) 3 mg/m³ USA OSHA OSHA PEL (Ceiling) (ppm) 1 ppm USA IDLH US IDLH (ppm) 25 ppm 8.2. 3), boron oxide (TLV-TWA = 10 mg/m. MDL number MFCD00013208. UBE RID . Oral, esophageal, and stomach burns are common. Molecular Weight 179.30 . NO water. I It forms strongly polarized donor-acceptor complexes with trimethyl- and triethylsilyl triflate. Repeated exposure of skin to vapours may result in dermatitis. 0000003028 00000 n 0000075589 00000 n Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Boron trifluoride diethyletherate TWA: 0.1 ppm Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health Administration Engineering Measures Use only under a chemical fume hood. Boron Trichloride: TLV(R) Chemical Substances 7th Edition Documentation ACGIH(R) Format: Electronic (digital download/no shipping) Member - $48.00 NonMember - $60.00 Org Supporter - $0.00 + Add to Cart. Atomic layer etch and pulsed plasma etch. %PDF-1.4 %���� boron trichloride ACGIH TLV (United States, 3/2017). Gives off irritating or toxic fumes (or gases) in a fire. 0000004372 00000 n See the chart below and download the safety data sheet for more information on buying boron trichloride from Praxair. UBE was the first company to produce boron trichloride in Japan, and it is of the highest quality and purity, making a perfect choice for a dry-etching gas for aluminum wires. 0000076224 00000 n 0000009952 00000 n xref �. startxref 0000068627 00000 n Use process enclosures, local exhaust ventilation or other engineering controls to keep worker exposure to airborne contaminants below any recommended or statutory limits. Causes eye, skin, and respiratory tract burns. RID-TRAPPER . Boron trichloride gas may cause severe irritation, chemical burns with ulceration and scarring of the skin. TLV ® /BEI ® Guidelines. Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 Carbon Dioxide ≤5 ppmv ≤2.0 ppmv ≤0.5 ppmv Ca ≤10 K ≤20 0000005884 00000 n BCl₃ is mainly used for fine etching of aluminum circuits in the manuf-acturing process of LCD panels. 3.5 ... Boron trichloride BCl 3 117.2 3 - 3 25 *** v. Boron trifluoride BF 3 67.8 1 1 1 25 *** vi. x�b```b``�g`c`�]� Ȁ ��@Q� ���� �R]�A��d���畯0�FV���,A)�zs���e&Opt�,��(2�t�������|p�x�q�oR؝��GDL�۶zN�e�]��#+ߪt����������k�˸�f 2a�A�`��3�DU��-���+ie 6{K�������[ô�(f#V�;� BORON TRIBROMIDE BORON TRICHLORIDE BORON TRIFLUORIDE SEC-BUTYL ACETATE TERT-BUTYL ACETATE CALCIUM SILICATE, naturally occurring as WOLLASTONITE CALCIUM SILICATE, synthetic nonfibrous CYANOGEN HARD METALS, containing COBALT and TUNGSTEN CARBIDE as Co ISOBUTYL ACETATE PROPOXUR SIMAZINE TOLUENE DIISOCYANATE, 2,4- and 2,6- as a mixture … 3.4 TLV-TWA: Not listed. <<6A1A5510015C1240B3086346058393D6>]>> 3), and inorganic borates (TLV-TWA = 2 mg/m. BCl₃ Product information Characteristics Physical data Product specification Shipping information BCl₃ is the main gas composition in High-K and metal anisotropic plasma etch. 0 1008 125. 0000016776 00000 n Signs and Symptoms of Acute Boron Trichloride Exposure: Signs and symptoms of acute ingestion of boron trichloride may be severe and include salivation, intense thirst, difficulty in swallowing, chills, pain, and shock. 0000011003 00000 n xڤ�|TU�?~ι����5��Lf2� %�U�J�$��� 0000008156 00000 n 0000002109 00000 n endstream 0000038768 00000 n 0000007497 00000 n 0000001461 00000 n 0000000016 00000 n 3.5 TLV-STEL: Not listed. This equipment efficiently renders the various toxic gases emitted during the semiconductor manufacturing process chemically and physically harmless. 0000012184 00000 n 0000003655 00000 n 0000008891 00000 n Boron trichloride is a boron halide. Boron trichloride (10294-34-5) ACGIH ACGIH TLV-C (ppm) 0.7 ppm ACGIH Not established USA OSHA Not established 8.2. H336 May cause drowsiness or dizziness. endobj 6 0 obj <>stream American Conference of Governmental Industrial Hygienists, «Boron Trichloride (CAS 10294-34-5).» In: Documentation of the threshold limit values and biological exposure indices / Documentation of TLV's and BEI's. Effective January 6, 2020, Boron trifluoride will be reflected in the Table of ELs for Excluded Substances in Policy R5.48-1 as BC ELs as follows: PRODUCT NAME : CONCENTRATION Boron Trichloride: >99% At Praxair, we develop the right grades for the right applications. 0000015591 00000 n Back to tab navigation. It is also used in the refining of aluminium, magnesium, zinc, and copper alloys to remove nitrides, carbides, and oxides from molten metal. H300 Fatal if swallowed. Exposure controls / personal protection. Basis for revised IDLH: The revised IDLH for boron trifluoride is 25 ppm based on subchronic inhalation toxicity data in animals [Rusch et al. H361 Suspected of damaging fertility or the unborn child. Publication #0100Doc. BORON TRICHLORIDE Class: 2.3(8) Packaging group: N/A Labels: 2.3(TOXIC) AND 8(CORROSIVE) Remarks open all close all. H��UMo�0��W�� �J���0��v�!�B�b�3l��#%;I[gݖ���G=>>Q SpecialProvisions open all close all. It compiles information from several government agencies and organizations. Exposure controls/personal protection Ingredient name Exposure limits Appropriate engineering controls:Use only with adequate ventilation. It is soluble in water and slowly hydrolyzed by cold water to give off hydrofluoric acid, a … 0000076859 00000 n 3.6 TLV-Ceiling: Not listed. values (TLV) for occupational exposures to boron trifluoride (TLV-Ceiling = 2.8 mg/m. 76 0 obj <>stream Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. 39 0 obj <> endobj 0000001540 00000 n 0000005215 00000 n NACRES NA.22 3), boron tribromide (TLV-Ceiling = 10 mg/m. H331 Toxic if inhaled. 0000002876 00000 n Fumes irritate the eyes and mucous membranes. Boron trichloride has been found to be an efficient reagent for the selective cleavage of sterically hindered methoxy groups in methoxyarenes; the scope and utility of this reaction are explored. 39 38 Under prolonged exposure to fire or intense heat, the containers may rupture violently and rocket. Related. 0000014413 00000 n Boron trichloride is a starting material for the production of elemental boron. Documentation, Publications, and Data. %PDF-1.6 %���� Boron Trichloride BCl 3 Grade Semicon 4N5 ULSI 5N Gigabit 5N5 Purity, % 99.995 99.999 99.9995 Metals, ppbw Oxygen ≤9 ppmv ≤1.0 ppmv ≤0.5 ppmv Al ≤20 Ni ≤10 Nitrogen ≤30 ppmv ≤4.0 ppmv ≤0.5 ppmv Cr ≤10 Na ≤20 3. as inhalable particulate). C: 0.7 ppm Section 8. 0000006540 00000 n PubChem Substance ID 24854843. (2016). 0000039019 00000 n 1270 ppm None currently established. 7637-07-2 RTECS No. Corrosive to metals and tissue and is toxic. Boron trichloride appears as a colorless gas with a pungent odor. BCl 3. ED2275000. 0000001682 00000 n Q����Q��'��L+Tl�j�]}�ï���>u߄�X�M=�m�X>�����%�) Boron trifluoride is a colorless gas with a pungent odor. ���O9�v՘�#��Qk�z����R��z�ħ���0�ԨF, Bromine Br 2 159.8 0.1 0.2 0.3 3 TZS 751 vii. In case of fire in the surroundings, use appropriate extinguishing media. Notice of Intended Changes; Downloadable TLV ® and BEI ® Documentation; TLV ® /BEI ®-Related Publications; Under Study; Substances and Agents Listing; Policies, Procedures & Presentations. Description: Each 7th Edition Documentation summarizes and evaluates the scientific data from which its TLV ® or BEI ® is derived. Carbon dioxide CO 2 44 5 000 30 000 30 000 40 000 TZS 1816 viii. Cincinnati, Ohio : ACGIH. trailer B Boron trichloride assisted reaction between acid chlorides and alkynyltrifluoroborate salts have been reported to form ynones. Component ACGIH TLV OSHA PEL NIOSH IDLH Mexico OEL (TWA) Methylene chloride TWA: 50 ppm (Vacated) TWA: 500 ppm (Vacated) STEL: 2000 ppm (Vacated) Ceiling: 1000 ppm TWA: 25 ppm STEL: 125 ppm IDLH: 2300 ppm TWA: 50 ppm Boron trichloride Ceiling: 0.7 ppm Legend ACGIH - American Conference of Governmental Industrial Hygienists OSHA - Occupational Safety and Health … It has been used as a soldering flux for alloys of aluminium, iron, zinc, tungsten, and monel. �&���ֵ`ǂP׬��ZXص몬"��(�ˢ+d���33!�������/����2�����>�\�BjB�9cŲ�����{^DH�0{�o���!Ʉ���\�j��:� Exposure controls Appropriate engineering controls : Use corrosion-proof equipment. It is toxic by inhalation. 0000001056 00000 n DOT ID & Guide. Use a local exhaust system, if necessary, to prevent oxygen deficiency and to keep hazardous fumes and gases below all applicable limits in the worker's breathing zone. 0000038525 00000 n 0000068547 00000 n 1 0 obj <>/XObject<>>>>> endobj 2 0 obj <> endobj 3 0 obj <> endobj 4 0 obj <>/FontDescriptor 3 0 R/CIDToGIDMap/Identity/W[0[750 277 666 556 333 556 610 222 500 556 222]11 13 556 14 15 277 16[333 277 333 722 556 333]22 23 556 24 25 722 26 30 556 31[277 556 500 666 500 277 666 833 277]40 43 556 44[722 666]46 47 556 48[777 666 722 556 777 666 277]55 56 666 57[833]58 60 500 61[943 722 610 722 277 222 500 354 399 777]71 72 277 73[583 1015 222 610]]>> endobj 5 0 obj <>stream 0000038041 00000 n Cited by. Emergency Overview 3. Boron trichloride. 0000016647 00000 n TLV-TWA (ACGIH) LD50 (Species & Routes) INGREDIENTS CAS NUMBER % (VOL) LC50 (Rat, 4 hrs.) About. H314 Causes severe skin burns and eye damage. Boron trichloride 100 10294-34-5 Not applicable. 0000038286 00000 n x�]��j�0F���l/���l���B.����8��5ll�8y���oڅ �p�g4G#OQ�w��_����’�����u��mȏ�������E ���LYc��.��4�Vŏ�t]��æ���6wa��ï��Xn��'\°���uN1��f��\B���}�����?_�y�B.`�ڱשi��琭��o��^ga��[��Q�S������ �@y�`T����J��7B��t��W��^/� �&l������P�Ƽ���Ȏ �%�G����c9>V>ª |*��x�c�S*���|,5� ���>ڔ >^c�SU �O��B>�|��%�qL-���|�U|,[/����>�|J]�O� �cy�K��I�},�O�҇�,|},|J���q,�§T��c�-�Cm� ��6�7�����(��1�ч��ۆ}$]��7-%�����೥����f9����F��(��i~?����$�O>̈́4�>�M���9��4�0b�p��9��q�cP��}�2� It participates in the hydroboration of alkenes. Boron trichloride . 0000068954 00000 n Generally has a … This chemical inventory is OSHA 's premier one-stop shop boron trichloride tlv occupational exposures to boron is... Flux for alloys of aluminium, iron, zinc, tungsten, and respiratory tract burns appears! Only with adequate ventilation a colorless gas with a pungent odor compiles information from several government agencies organizations... 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